JPH0415143U - - Google Patents
Info
- Publication number
- JPH0415143U JPH0415143U JP5675590U JP5675590U JPH0415143U JP H0415143 U JPH0415143 U JP H0415143U JP 5675590 U JP5675590 U JP 5675590U JP 5675590 U JP5675590 U JP 5675590U JP H0415143 U JPH0415143 U JP H0415143U
- Authority
- JP
- Japan
- Prior art keywords
- positioning component
- jig base
- electrode
- jig
- vertical positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5675590U JPH0415143U (en]) | 1990-05-30 | 1990-05-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5675590U JPH0415143U (en]) | 1990-05-30 | 1990-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0415143U true JPH0415143U (en]) | 1992-02-06 |
Family
ID=31580865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5675590U Pending JPH0415143U (en]) | 1990-05-30 | 1990-05-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0415143U (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003151485A (ja) * | 2001-11-19 | 2003-05-23 | Showa Shinku:Kk | イオンガン本体への付属部品の取付け方法及び取付け構造 |
-
1990
- 1990-05-30 JP JP5675590U patent/JPH0415143U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003151485A (ja) * | 2001-11-19 | 2003-05-23 | Showa Shinku:Kk | イオンガン本体への付属部品の取付け方法及び取付け構造 |
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